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Plasma Power Generators-MDX Series
Features
Low stored output energy with adjustable arc suppression time
Low ripple
Compact design
Voltage, current, and power regulation modes
Front panel and analog interface control
Description
Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.
Applications
Deposition
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